Development of low frequency, insulating thick diaphragms for power MEMS applications
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Journal Articles
Sensors and Actuators A: Physical
Year : 2013
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https://univ-smb.hal.science/hal-01322282
Submitted on : Thursday, May 26, 2016-6:49:27 PM
Last modification on : Thursday, April 4, 2024-8:56:18 PM
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- HAL Id : hal-01322282 , version 1
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Fabien Formosa, Adrien Badel, Hugues Favreliere. Development of low frequency, insulating thick diaphragms for power MEMS applications. Sensors and Actuators A: Physical , 2013, 189, pp.370--379. ⟨hal-01322282⟩
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